DocumentCode
19301
Title
Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor
Author
Cosme Furlong استاد مشاور , Ryszard Pryputniewicz استاد راهنما
University
WPI
Grade
نامعلوم
Major
MS )Mechanical Engineering(
Number of pages
0
Publish Date
2003
Keyword
resonance , Chemical , Cantilever , MEMS , Polymer , micromechanical , ABSORPTION , AFM , SEM , Holography , optoelectronic , Frequency , Hydrogen , Vibration , PALLADIUM , vibrometry , detection , Silicon
Note
01
Language
انگليسي
Link To Document