DocumentCode
20542
Title
Development of a modular interferometric microscopy system for characterization of MEMS
Author
Ryszard J. Pryputniewicz استاد راهنما , Nancy A. Burnham استاد مشاور
University
WPI
Grade
نامعلوم
Major
MS )Mechanical Engineering(
Number of pages
0
Publish Date
2007
Keyword
Vacuum , shape and deformation measurement , MEMS , scanning white light , Interferometry , Vibration , vibrometry , thermal
Note
01
Language
انگليسي
Link To Document