DocumentCode
21995
Title
Electron Beam Chemical Vapor Deposition of Platinum and Carbon
Author
Orlando Thomas M. استاد مشاور , Sitaraman Suresh استاد مشاور , Lackey Jack استاد راهنما
University
Georgia University Of Technology
Grade
نامعلوم
Major
Master of Science )Mechanical Engineering(
Number of pages
0
Publish Date
2005
Keyword
Dissociation , nanoscale , EBCVD , deposition rates , EBID , optimization , Electron Beam Chemical Vapor Deposition , carbon , Platinum , Amorphous
Note
01
Language
انگليسي
Link To Document