• DocumentCode
    21995
  • Title

    Electron Beam Chemical Vapor Deposition of Platinum and Carbon

  • Author

    Orlando Thomas M. استاد مشاور , Sitaraman Suresh استاد مشاور , Lackey Jack استاد راهنما

  • University
    Georgia University Of Technology
  • Grade
    نامعلوم
  • Major
    Master of Science )Mechanical Engineering(
  • Number of pages
    0
  • Publish Date
    2005
  • Keyword

    Dissociation , nanoscale , EBCVD , deposition rates , EBID , optimization , Electron Beam Chemical Vapor Deposition , carbon , Platinum , Amorphous

  • Note
    01
  • Language
    انگليسي