DocumentCode
23134
Title
Analysis of High-k Dielectric Thin Films with Time-of-Flight Medium Energy Backscattering
Author
Bridget Rogers استاد راهنما , G. Kane Jennings استاد مشاور , Robert Weller استاد مشاور
University
Vanderbilt University
Grade
نامعلوم
Major
PhD )Chemical Engineering(
Number of pages
0
Publish Date
2005
Keyword
high permittivity , backscattering spectrometry , depth resolution , interfacial analysis
Note
01
Language
انگليسي
Link To Document