DocumentCode
23292
Title
Preparation and properties of tantalum silicide films on silicon substrates
Author
Grow James M. استاد مشاور , Ravindra N. M. استاد راهنما
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
نامعلوم
Major
Master of Science )Materials Science and Engineering(
Number of pages
0
Publish Date
2000
Keyword
Tantalum silicide )TaSi2( thin films , silicon substrate VARIAN 3125 magnetron DC sputtering system
Note
01
Language
انگليسي
Link To Document