• DocumentCode
    23990
  • Title

    Programmable latching probe microstructures for wafer testing applications

  • Author

    Cornely Roy H. استاد مشاور , Carr William N. استاد راهنما

  • University
    Van Houten Library )new Jersey Institute Of Technology(
  • Grade
    نامعلوم
  • Major
    Master of Science )Department of Electrical and Computer Engineering(
  • Number of pages
    0
  • Publish Date
    2000
  • Keyword

    Micro Electromechanical systems )MEMS( , Programmable wafer testing array

  • Note
    01
  • Language
    انگليسي