DocumentCode
24003
Title
An investigation of electrical and optical properties of reactively sputtered silicon nitride and amorphous hydrogenated silicon thin films
Author
Cornely Roy H. استاد مشاور , Sohn Kenneth استاد راهنما
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
نامعلوم
Major
Master of Science )Electrical Engineering(
Number of pages
0
Publish Date
1988
Keyword
Thin films --Electric properties. , Thin films --Optical properties , Sputtering )Physics(.
Note
01
Language
انگليسي
Link To Document