DocumentCode
24012
Title
An investigation of electrical and optical properties of sputtered amorphous silicon nitride and germanium thin films
Author
Cornely Roy H. استاد مشاور , Sohn Kenneth استاد راهنما
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
نامعلوم
Major
Master of Science )Electrical Engineering(
Number of pages
0
Publish Date
1987
Keyword
Thin films --Electric properties , Thin films --Optical properties , Sputtering )Physics(.
Note
01
Language
انگليسي
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