DocumentCode
24061
Title
Modeling and Control of Surface Micromachined Thermal Actuators
University
Brigham young University
Grade
نامعلوم
Major
Mechanical Engineering
Number of pages
0
Publish Date
2004
Keyword
MEMS , feedback control , FEA , piezoresistivity , response time , Finite element , TIM , thermal actuator
Note
01
Language
انگليسي
Link To Document