• DocumentCode
    25023
  • Title

    Development of micro-electromechanical systems in GaN

  • Author

    James Eisenstein استاد راهنما , Jerry Pine استاد مشاور , Michael Cross استاد مشاور

  • University
    Caltech Library System
  • Grade
    نامعلوم
  • Major
    PhD
  • Number of pages
    0
  • Publish Date
    2003
  • Keyword

    III-V nitride semiconductors , GaN , piezoelectric sensors , transducers , MEMS , Microfluidics

  • Note
    01
  • Language
    انگليسي