DocumentCode
27343
Title
Modeling of the plasma etching of polysilicon with chloro- and bromo-trifluoromethane discharges
Author
Herbert H. Swain. استاد راهنما
University
Dspace at Mit Libraries
Grade
نامعلوم
Major
Thesis )Ph. D.(
Number of pages
0
Publish Date
1986
Note
01
Language
انگليسي
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