DocumentCode
4248
Title
Development of Techniques to Quantify Chemical and Mechanical Modifications of Polymer Surfaces: Application to Chemical Mechanical Polishing
Author
MORRIS JEFFREY F. استاد مشاور , Hess Dennis W. استاد راهنما
University
Georgia Institute Of Technology
Grade
دكتري
Major
Doctor of Philosophy
Number of pages
0
Publish Date
2004
Keyword
chemical mechanical polishing , Depth profile , Polymer , Optical properties , angle resolved XPS
Note
01
Language
انگليسي
Link To Document