DocumentCode

5544

Title

Polysilicon micromotors for fluidic and optical applications

Author

Mehran Mehregany استاد راهنما

University

OhioLINK ETD

Grade

دكتري

Major

Doctor of Philosophy )Case Western Reserve University, Electrical Engineering(

Number of pages

0

Publish Date

1994

Note

01

Language

انگليسي