DocumentCode
8855
Title
Ru- based Gate Electrodes for Advanced Dual-Metal Gate CMOS Devices
Author
V. Misra استاد راهنما
University
Raleigh North carolina state university
Grade
نامعلوم
Major
phD )Electrical engineering(
Number of pages
0
Publish Date
2001
Keyword
gate electrode CMOS metal ruthenium alloy
Note
01
Language
انگليسي
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