DocumentCode
9297
Title
Pulsed DC reactive magnetron sputtering of aluminum niriide thin films
Author
Jerome J. Cuomo استاد راهنما
University
Raleigh North carolina state university
Grade
نامعلوم
Major
PhD )Materials Scince and Engineering(
Number of pages
0
Publish Date
2002
Keyword
plasma diagnostics thermal conductivity AIN Pullsed DC sputtering
Note
01
Language
انگليسي
Link To Document