DocumentCode
9583
Title
Properties of Zr Silicate and Zr-Si Oxynitride High-k Dielectric Alloys for Advanced Microelectronic Applications; Chemical and Electrical Characterizations
Author
Gerald Lucovsky استاد راهنما , Jon - paul Maria استاد مشاور , Robert Nemanich استاد مشاور , Carl Osburn استاد مشاور
University
Raleigh North carolina state university
Grade
نامعلوم
Major
PhD )Materials Science and Engineering(
Number of pages
0
Publish Date
2005
Keyword
High-k , pseudo-binary)ternary( , Gate dielectric
Note
01
Language
انگليسي
Link To Document