DocumentCode
9936
Title
Spin Coating and photolithography Using Liquid and Supercritical Carbon Dioxide
Author
Gregory Parsons استاد مشاور , Christine Grant استاد مشاور , Rubem Carbonell استاد مشاور , Joseph Desimone استاد راهنما
University
Raleigh North carolina state university
Grade
نامعلوم
Major
PhD )Chemical Engineering(
Number of pages
0
Publish Date
2002
Keyword
spin coating photolithography carbon dioxide supercritical fluid
Note
01
Language
انگليسي
Link To Document