Structural Properties of Vacuum Evaporated ZnSe Thin Films

Thermally evaporated ZnSe thin films deposited on glass substrates within R.T and annealing (Ta) at 423، 473، 573 oK are of polycrystalline nature having f.c.c. Zinc blend structure. The most preferential orientation is along [111 ] direction for all deposited films together with other abundant planes [ 220 ] and [ 311 ] for films annealing at573 K. The lattice parameter, grain size average internal stress, microstrain, dislocation density in the film are calculated and correlated with Ta.