اثر دماي بازپخت روي لايه نازك نقره انباشتي به روش سيستم كندوپاش مغناطيسي جريان مستقيم

In this paper,optimize of laser damage threshold for Tio2 thin films by annealing process in annealing oven is investigated. Coating was done by electron gun evaporation. Then, Samples were annealed in 300, 400 and 600 ºC, in vacuum for 2 hour. Then, laser damage threshold of the samples was measeured. We, also, measured of optical spectra and roughness by Spectrophotometer and SPM .We find that damage threshold and roughness of the samples are increased by increase annealing temperature.Transmitance of the samples are increased by increase annealing temperature,too.It caused by difference in coefficient of refraction.