A Novel Electrostatically Actuated High Q RF MEMS Tunable Capacitor for UHF Applications

پديدآورندگان

Hadi Mirzajani , Habib Badri Ghavifekr ,

كليدواژه

Tunable Capacitor , microsystem , microelectromechanical system , MEMS , Radio Frequency circuit , RF-MEMS, Varactor

كشور

ايران

نويسنده

Mehrdad Khodapanahandeh

كلمات كليدي

Tunable Capacitor; microsystem; microelectromechanical system; MEMS; Radio Frequency circuit; RF-MEMS, Varactor

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