Electrode Configuration for Complete Suppression of Spurious Modes in Capacitive RF MEMS Ring Resonators

پديدآورندگان

Kobra Behzadi ,

كليدواژه

RF MEMS , Resonator , Spurious modes , Motional resistance , Quality factor (key words)

كشور

ايران

نويسنده

Masoud Baghelani

كلمات كليدي

RF MEMS; Resonator; Spurious modes; Motional resistance; Quality factor (key words)

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