بررسي تاثير پارامترهاي موثر در رشد نانوكريستال الماس با استفاده از دستگاه HFCVD

Given the fact that the goal of the current paper is both to study how structural parameters depend on growth parameters and to introduce optimum point, the time of the growth and methane gas ratio to total entrance gas in system (CH4/CH4+H2) were chosen as independent parameters and changes of the structural parameters like surface average roughness, crystallity percent and diamond crystal size have been studied regarding these parameters. In this project, HFCVD system has been employed as process, CH4 as carburized gas and H2 as a diluting gas.