DocumentCode
1011874
Title
Properties of RF sputtered iron oxide thin films with CoCr and Nb as dopants
Author
Lin, J.K. ; Silvertsen, J. ; Judy, J.H.
Author_Institution
University of Minnesota, Minneapolis, Minnesota.
Volume
21
Issue
5
fYear
1985
fDate
9/1/1985 12:00:00 AM
Firstpage
1462
Lastpage
1464
Abstract
Sputtered pure iron oxide thin films exhibit preferred orientation with {111} planes parallel to the film surface. Both CoCr and Nb doping reduce this texture significantly. Both CoCr and Nb doped γ-Fe2 O3 films exhibit perpendicular anisotropy, which is attributed to stress-induced anisotropy. The γ-Fe2 O3 films deposited on Al-coated glass substrates show lower Ms but higher Hc values than those deposited on glass substrats. Also, greater difficulty was encountered for the oxidation of Fe3 O4 to γ-Fe2 O3 films when they were deposited on Al-coated glass substrates as compared to be deposited on bare glass substrates.
Keywords
Magnetic film memories; Character generation; Glass; Iron; Magnetic films; Niobium; Oxidation; Radio frequency; Sputtering; Substrates; Temperature;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1985.1063953
Filename
1063953
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