Effect of Microlens Array for Mos Color Imager

A high-photosensitivity and well-balanced color reproduction color imager with a monolithic microlens array was developed. The microlens array was formed on a 2/3-inch MOS color imager using a photolithographic technique with a transparent photoresist. The microlens array was arranged on the top of only the green portions of the mosaic filter (G-lens array) of the color imager. For an imager with a 2.0-um thick G-lens, the photosensitivity was raised 25% over the relative response of the green signal for an imager without a G-lens array, and the color image reproduced by the G-lens imager was better balanced than that of the original device.