High rate sputtering of CoCr with large scale magnetrons - dependence of magnetic properties on sputtering parameters

CoCr-layers have been DC-magnetron sputtered onto polyimide web. Anisotropy field HKand coercive force HCas well as column sizes have been investigated. The influence of deposition parameters: cathode power, coating drum temperature and angle of incidence on the magnetic and structural properties will be discussed. It is shown that the layer properties as typically required for perpendicular recording media can be achieved on production size scale.