DocumentCode
1024702
Title
Experimental considerations in the quest for a thin-film superconducting field-effect transistor
Author
Hebard, A.F. ; Fiory, A.T. ; Eick, R.H.
Author_Institution
AT&T Bell Laboratories, Murray Hill, New Jersey
Volume
23
Issue
2
fYear
1987
fDate
3/1/1987 12:00:00 AM
Firstpage
1279
Lastpage
1282
Abstract
Trilayer structures, comprising a thin-film In/InOx superconductor separated from an Al gate electrode by an overgrown dielectric, have been studied to ascertain the feasibility of electric-field control of superconductivity for device applications, Modulation of the areal charge density of 50-Å thick In/InOx films has been found to cause more than a 350Ω/
change in the sheet resistance near the midpoint of the resistive transition in one film and the creation of ~10Ω/
of resistance from the superconducting state of a second film. We report on efforts to increase this modulation by decreasing the electron density of unperturbed films, improving the charge storage capabilities of the thin-film gate dielectrics, and improving the carrier mobility which has been found to be sensitive to interface preparation. Device implications, based on these results, are also discussed.
change in the sheet resistance near the midpoint of the resistive transition in one film and the creation of ~10Ω/
of resistance from the superconducting state of a second film. We report on efforts to increase this modulation by decreasing the electron density of unperturbed films, improving the charge storage capabilities of the thin-film gate dielectrics, and improving the carrier mobility which has been found to be sensitive to interface preparation. Device implications, based on these results, are also discussed.Keywords
Superconducting films; Thin-film transistors; Dielectric devices; Dielectric thin films; Electrodes; FETs; Superconducting films; Superconducting thin films; Superconductivity; Thickness control; Thin film devices; Thin film transistors;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1987.1065058
Filename
1065058
Link To Document