DocumentCode
1026527
Title
CoCr-sputtering in large scale roll coating systems
Author
Mayr, M. ; Ludwig, R. ; Kastner, K. ; Kukla, R. ; Dalmann, B. ; Haberkorn, H. ; Hitzfeld, M.
Author_Institution
LEYBOLD-HERAEUS GMBH, Hanau/main
Volume
23
Issue
5
fYear
1987
fDate
9/1/1987 12:00:00 AM
Firstpage
2049
Lastpage
2051
Abstract
CoCr-layers have been DC-magnetron sputtered onto Polyimide web in a 2 side sputter roll coater for 1.2 m web width. Magnetic as well as crystallographic properties have been investigated as function of the deposition parameters: layer thickness, coating drum temperature, background pressure and angle of incidence. First measurements of electro-magnetic properties also have been made. The influence of different protective layers on the lifetime of a CoCr floppy disk has been checked in first experiments.
Keywords
Perpendicular magnetic recording; Coatings; Crystallography; Large-scale systems; Lattices; Magnetic properties; Position measurement; Pressure effects; Pressure measurement; Temperature dependence; Thickness measurement;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1987.1065233
Filename
1065233
Link To Document