Modified Duc de Chaulnes´ method for measurement of mode indexes of semiconductor slab waveguides

Author

Ura, Shogo ; Suhara, Toshiaki ; Nishihara, Hiroshi

Author_Institution

Dept. of Electron. Eng., Osaka Univ., Japan

Volume

5

Issue

12

fYear

1993

Firstpage

1421

Lastpage

1423

Abstract

For measuring mode indexes of AlGaAs waveguides, a modified Duc de Chaulnes method, which is noncontact, nondestructive, and applicable to high index as well as buried waveguide, is proposed and discussed. Mode indexes are measured by reference to the substrate index by comparing waveguide and substrate in the displacement of image. Measurement accuracy is improved in comparison with the conventional Duc de Chaulnes method. From experimental work on the identification accuracy of the imaging objective position, it was confirmed that the error in the mode index was smaller than 0.2%.<>

Keywords

III-V semiconductors; aluminium compounds; gallium arsenide; integrated optics; measurement errors; optical testing; optical waveguides; refractive index measurement; AlGaAs; AlGaAs waveguides; Duc de Chaulnes´ method; buried waveguide; high index; identification accuracy; image displacement; imaging objective position; measurement accuracy; mode index errors; mode indexes; noncontact,; nondestructive; semiconductor slab waveguides; substrate index; Displacement measurement; Focusing; Gratings; Length measurement; Optical waveguides; Position measurement; Refractive index; Semiconductor waveguides; Slabs; Substrates;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.262562

Filename

262562