DocumentCode
1031364
Title
A V -band wafer probe using ridge-trough waveguide
Author
Godshalk, Edward M.
Author_Institution
Cascade Microtech, Beaverton, OR, USA
Volume
39
Issue
12
fYear
1991
fDate
12/1/1991 12:00:00 AM
Firstpage
2218
Lastpage
2228
Abstract
A V -band (50-75 GHz) wafer probe is presented. The probe features a type of waveguide developed to allow transition from rectangular waveguide to coplanar waveguide. The waveguide consists of a ridge extending from the upper waveguide wall into a trough in the lower waveguide wall, and is known as the ridge-trough waveguide. A mathematical model is presented that allows important properties of the ridge-trough waveguide, such as the cutoff frequency and characteristic impedance, to be calculated
Keywords
MMIC; electric impedance; equivalent circuits; integrated circuit testing; microwave measurement; probes; semiconductor device testing; solid-state microwave devices; waveguide components; 50 to 75 GHz; CPW/rectangular waveguide transition; EHF; MM-wave probe; V-band wafer probe; characteristic impedance; cutoff frequency; mathematical model; ridge-trough waveguide; Conductors; Coplanar waveguides; Fingers; Frequency; Gold; Mathematical model; Nickel; Probes; Rectangular waveguides; Waveguide transitions;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/22.106568
Filename
106568
Link To Document