DocumentCode

1032337

Title

Resistless fabrication of integrated circuits

Author

O´Keeffe, T.W. ; Handy, R.M.

Volume

15

Issue

6

fYear

1968

fDate

6/1/1968 12:00:00 AM

Firstpage

436

Lastpage

436

Keywords

Application specific integrated circuits; Circuit noise; Electron beams; Etching; Fabrication; Image generation; Interference; Lenses; Silicon; Substrates;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1968.16353

Filename

1475255