DocumentCode
1032348
Title
Erratum: Wavelength dependence of optical oxidation of silicon
Author
Boyd, I.W. ; Micheli, F.
Volume
23
Issue
9
fYear
1987
Firstpage
480
Keywords
laser beam applications; laser beam effects; oxidation; semiconductor technology; silicon; Ar laser; CW Ar laser radiation; Si oxidation; laser enhanced oxidation of Si; oxidation rate; photonic contribution; wavelength dependence;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19870345
Filename
4257675
Link To Document