DocumentCode
1033120
Title
The application of ion implantation to specific device structures
Author
Brook, P. ; Hambleton, K.G. ; Large, L.N. ; Whitehead, C.S.
Volume
15
Issue
9
fYear
1968
fDate
9/1/1968 12:00:00 AM
Firstpage
687
Lastpage
687
Keywords
Bandwidth; Capacitance-voltage characteristics; Detectors; Ion implantation; Laboratories; PIN photodiodes; Photodetectors; Production systems; Schottky diodes; Silicon;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1968.16435
Filename
1475337
Link To Document