DocumentCode
1033985
Title
Failure analysis of ULSI circuits using photon emission
Author
Uraoka, Yukiharu ; Miyanaga, Isao ; Tsuji, Kazuhiko ; Akiyama, Shigenobu
Author_Institution
Matsushita Electr. Ind. Co. Ltd., Osaka, Japan
Volume
6
Issue
4
fYear
1993
fDate
11/1/1993 12:00:00 AM
Firstpage
324
Lastpage
331
Abstract
A real-time failure analysis technique for ULSI circuits using photon emission is proposed. This technique utilizes a photon detection system combined with a circuit tester. Improved failure detection is achieved because the tester can bias arbitrary blocks in the ULSI chip. Detecting and correct process defects and design errors improves the reliability of the ULSI chip
Keywords
VLSI; circuit reliability; failure analysis; integrated circuit testing; production testing; ULSI circuits; circuit tester; design errors; failure detection; photon detection system; photon emission; process defects; real-time failure analysis technique; Cable shielding; Central Processing Unit; Circuit testing; Failure analysis; Large scale integration; Optical filters; Optical microscopy; Signal generators; Test pattern generators; Ultra large scale integration;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/66.267642
Filename
267642
Link To Document