A Hybrid Microfluidic/CMOS Capacitive Sensor Dedicated to Lab-on-Chip Applications

Author

Ghafar-Zadeh, Ebrahim ; Sawan, M.

Author_Institution

Polystim Neurotechnol. Lab., Montreal

Volume

1

Issue

4

fYear

2007

Firstpage

270

Lastpage

277

Abstract

A hybrid microfluidic/IC capacitive sensor is presented in this paper for highly integrated lab-on-chips (LoCs). We put forward the design and implementation of a charge based capacitive sensor array in 0.18-mum CMOS process. This sensor chip is incorporated with a microfluidic channel using direct-write microfluidic fabrication process (DWFP). The design, construction and experimental results as well are demonstrated using four different chemical solutions with known dielectric constants. The proposed highly sensitive CMOS capacitive sensor (ap530 mV/fF) along with low complexity DWFP emerges as clear favorite for LoC applications.

Keywords

CMOS integrated circuits; bioMEMS; capacitive sensors; lab-on-a-chip; microfluidics; CMOS; capacitive sensor; direct-write microfluidic fabrication process; lab-on-chips; microfluidic channel; sensor chip; CMOS process; CMOS technology; Capacitance measurement; Capacitive sensors; Chemical sensors; Circuits; Electrodes; Lab-on-a-chip; Microfluidics; Sensor arrays; CMOS technology; Capacitive sensor; lab-on-chip (LoC); microfluidic packaging;

fLanguage

English

Journal_Title

Biomedical Circuits and Systems, IEEE Transactions on

Publisher

ieee

ISSN

1932-4545

Type

jour

DOI

10.1109/TBCAS.2008.915641

Filename

4432301