DocumentCode
1038480
Title
Plasma techniques used for fabricating cryoelectric device arrays
Author
Pierce, J.
Author_Institution
Texas Instruments, Inc., Dallas, Tex.
Volume
4
Issue
3
fYear
1968
fDate
9/1/1968 12:00:00 AM
Firstpage
324
Lastpage
325
Keywords
Josephson junction; Superconducting devices; Fabrication; Granular superconductors; Insulation; Plasma chemistry; Plasma devices; Plasma materials processing; Resists; Superconducting epitaxial layers; Superconducting films; Tunneling;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1968.1066349
Filename
1066349
Link To Document