• DocumentCode
    1045211
  • Title

    Spiral Inductors Using Polymer-Core Conductors

  • Author

    Yook, Jong-Min ; Kwon, Young-Se

  • Volume
    17
  • Issue
    7
  • fYear
    2007
  • fDate
    7/1/2007 12:00:00 AM
  • Firstpage
    495
  • Lastpage
    497
  • Abstract
    We made thick spiral inductors using a polymer-core conductor. The proposed fabrication process to make the polymer-core conductor is very easy and cost effective compared with other radio frequency microelectromechanical systems processes. SU-8 photoresist was used as the core. The fabricated spiral inductors on a high resistivity silicon, 2500 Omega have a very high Q factor of more than 40 at 2 GHz.
  • Keywords
    conductors (electric); electroplated coatings; inductors; photoresists; SU-8 photoresist; frequency 2 GHz; polymer-core conductors; spiral inductors; Conductivity; Conductors; Costs; Fabrication; Inductors; Polymers; Radiofrequency microelectromechanical systems; Resists; Silicon; Spirals; High $Q$; SU-8; inductor; polymer-core conductor;
  • fLanguage
    English
  • Journal_Title
    Microwave and Wireless Components Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1531-1309
  • Type

    jour

  • DOI
    10.1109/LMWC.2007.899305
  • Filename
    4266860
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1045211