DocumentCode
1049376
Title
Thin-film distributed RC parameter strain gauges
Author
Stolinski, Edward J. ; Meiksin, Z.H.
Author_Institution
Bettis Atomic Power Laboratory, West Mifflin, Pa.
Volume
22
Issue
3
fYear
1975
fDate
3/1/1975 12:00:00 AM
Firstpage
102
Lastpage
108
Abstract
Thin-film cermet resistance strain gauges provide gauge factors of the order of 15, while providing higher stability than achievable with discontinuous thin-film metallic strain gauges. Strain-sensitive cermet resistors can be incorporated advantageously into thin-film distributed parameter notch filters. This results in a highly sensitive strain-sensing device which can be fabricated by a simple process germain to the thin-film microelectronic technology.
Keywords
Capacitive sensors; Ceramics; Cleaning; Dielectrics; Filters; Helium; Resistors; Stability; Thin film circuits; Transistors;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1975.18087
Filename
1477922
Link To Document