DocumentCode
1050340
Title
Bending characteristics of SU-8
Author
Spratley, J.P.F. ; Ward, M.C.L. ; Hall, P.S.
Author_Institution
Univ. of Birmingham, Birmingham
Volume
2
Issue
2
fYear
2007
fDate
6/1/2007 12:00:00 AM
Firstpage
20
Lastpage
23
Abstract
This study characterises SU-8´s material properties under large deformations in out-of-plane bending. A novel test setup is presented to deform the SU-8 to high levels, and a mathematical model presented that accurately predicts the results. This test shows that hard-baked SU-8, with a Young´s modulus tested at 1.9 GPa, is capable of undergoing stresses of up to 120 MPa before failure and in some cases will undergo plastic deformation.
Keywords
Young´s modulus; bending; failure (mechanical); plastic deformation; Young´s modulus; hard-baked SU-8 material; out-of-plane bending; plastic deformation;
fLanguage
English
Journal_Title
Micro & Nano Letters, IET
Publisher
iet
ISSN
1750-0443
Type
jour
DOI
10.1049/mnl:20070022
Filename
4268298
Link To Document