DocumentCode

1058502

Title

VI-7 ESR signatures of defects near the Si/SiO2interface

Author

Poindexter, E.H. ; Caplan, P.J.

Volume

24

Issue

9

fYear

1977

fDate

9/1/1977 12:00:00 AM

Firstpage

1217

Lastpage

1217

Keywords

Annealing; Conductivity; Etching; Iron; Mouth; Paramagnetic resonance; Signal processing; Silicon; Surface cracks; Surface topography;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1977.18979

Filename

1479171