Tradeoff between threshold voltage and breakdown in high-voltage double-diffused MOS transistors

The design of junction isolated DMOS transistors suitable for monolithic integration has been studied. The purpose of this correspondence is to describe one of the key tradeoffs when designing these devices for high breakdown voltages (200 V for our example). It is a tradeoff primarily between threshold voltage and the punchthrough voltage of the channel diffusion, however, the avalanche breakdown voltage, on-resistance, and source-to-substrate punchthrough voltage are also affected. As an example, the design of a device for 200-V operation is described. The discussion is, however, general and can be applied to other DMOS designs as well.