• DocumentCode
    1062452
  • Title

    Increase of gate capacitance in DMOST

  • Author

    Stikvoort, Eduard F.

  • Author_Institution
    Philips Research Laboratories, Eindhoven, Netherlands
  • Volume
    25
  • Issue
    12
  • fYear
    1978
  • fDate
    12/1/1978 12:00:00 AM
  • Firstpage
    1388
  • Lastpage
    1394
  • Abstract
    The gate capacitance of an n-channel DMOST at nonzero drain current biasing exceeds that of a similar conventional MOST and may even exceed the gate oxide capacitance. This effect is due to the behavior of mobile electrons in the device. The fundamental operation of the DMOST is understood through the use of a two-dimensional computer analysis. Based on this insight, the increase of the gate capacitance is clarified in terms of the electron velocity between the source and the drain. Gate capacitance measurements are carried out on experimental DMOST\´s, which are made on a p-background as well as on an n-epitaxial layer. The measured C-V curves qualitatively confirm the theory on the increase of the gate capacitance in its dependence on the background of the DMOST and the applied dc voltages.
  • Keywords
    Area measurement; Capacitance measurement; Capacitance-voltage characteristics; Electron mobility; Epitaxial layers; Semiconductor process modeling; Shape measurement; Substrates; Threshold voltage; Transconductance;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1978.19360
  • Filename
    1479754