DocumentCode
1062452
Title
Increase of gate capacitance in DMOST
Author
Stikvoort, Eduard F.
Author_Institution
Philips Research Laboratories, Eindhoven, Netherlands
Volume
25
Issue
12
fYear
1978
fDate
12/1/1978 12:00:00 AM
Firstpage
1388
Lastpage
1394
Abstract
The gate capacitance of an n-channel DMOST at nonzero drain current biasing exceeds that of a similar conventional MOST and may even exceed the gate oxide capacitance. This effect is due to the behavior of mobile electrons in the device. The fundamental operation of the DMOST is understood through the use of a two-dimensional computer analysis. Based on this insight, the increase of the gate capacitance is clarified in terms of the electron velocity between the source and the drain. Gate capacitance measurements are carried out on experimental DMOST\´s, which are made on a p-background as well as on an n-epitaxial layer. The measured
curves qualitatively confirm the theory on the increase of the gate capacitance in its dependence on the background of the DMOST and the applied dc voltages.
curves qualitatively confirm the theory on the increase of the gate capacitance in its dependence on the background of the DMOST and the applied dc voltages.Keywords
Area measurement; Capacitance measurement; Capacitance-voltage characteristics; Electron mobility; Epitaxial layers; Semiconductor process modeling; Shape measurement; Substrates; Threshold voltage; Transconductance;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1978.19360
Filename
1479754
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