Compositional separation of (Co-Cr-Pt)/Cr films for longitudinal recording and (Co-Cr)/Ti films for perpendicular recording

Author

Suzuki, Hiroyuki ; Goda, Noriyoshi ; Nagaike, Sadanori ; Shiroishi, Yoshihiro ; Shige, Noriyuki ; Tsumita, Norikazu

Author_Institution

Hitachi Ltd., Kanagawa, Japan

Volume

27

Issue

6

fYear

1991

fDate

11/1/1991 12:00:00 AM

Firstpage

4718

Lastpage

4720

Abstract

Compositional separation of (Co-Cr-Pt)/Cr films for longitudinal recording and (Co-Cr)/Ti films for perpendicular recording were examined by high resolution scanning electron microscopy (SEM) combined with selective chemical etching of the films using dilute aqua regia. A 150-nm-thick Co-Cr film over Ti underlayer for perpendicular recording was examined with this method. The CP (chrysanthemum-like pattern) structures (Maeda et al., 1986) due to the compositional separation were clearly observed. (Co-Cr-Pt)/Cr films for longitudinal recording were also examined. Even in this case, it was also possible to observe the compositional separation by SEM. The effects of sputtering condition on compositional separation and magnetic properties of (Co-Cr-Pt)/Cr films were investigated

Keywords

chromium; chromium alloys; cobalt alloys; etching; magnetic recording; magnetic switching; magnetic thin films; platinum alloys; scanning electron microscope examination of materials; titanium; CoCr-Ti; CoCrPt-Cr films; SEM; Ti underlayer; chrysanthemum-like pattern; compositional separation; dilute aqua regia; energy dispersive X-ray analysis; high resolution scanning electron microscopy; longitudinal recording; magnetic properties; perpendicular recording; selective chemical etching; sputtering condition; surface morphology; switching field distribution; Chemical analysis; Chromium; Etching; Fluorescence; Magnetic films; Microstructure; Perpendicular magnetic recording; Scanning electron microscopy; Transmission electron microscopy; X-rays;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.278925

Filename

278925