DocumentCode

1063987

Title

Correction of mask defects by laser beam

Author

Lee, Fred ; Mitchell, Jerome

Author_Institution

RCA, Somerville, NJ, USA

Volume

11

Issue

9

fYear

1975

fDate

9/1/1975 12:00:00 AM

Firstpage

843

Lastpage

843

Keywords

Glass; High speed optical techniques; Large scale integration; Laser beams; Microprocessors; Optical attenuators; Optical films; Optical materials; Optical pulses; Xenon;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1975.1068878

Filename

1068878