DocumentCode
1065976
Title
MP-A7 fabrication of devices with submicrometer dimensions using a selective edge plating technique and conventional photolithography
Author
Jackson, Thomas N. ; Masnari, N.A.
Volume
26
Issue
11
fYear
1979
fDate
11/1/1979 12:00:00 AM
Firstpage
1829
Lastpage
1829
Keywords
Aerospace electronics; Breakdown voltage; Contracts; Electric breakdown; Fabrication; Gallium arsenide; Gunn devices; Laboratories; Lithography; MESFETs;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1979.19704
Filename
1480282
Link To Document