• DocumentCode
    1065998
  • Title

    MP-B1 auger sputter profiling studies of phosphorus pileup at the Si-SiO2interface

  • Author

    Schwarz, S.A. ; Ho, Chu Po ; Helms, C.R.

  • Volume
    26
  • Issue
    11
  • fYear
    1979
  • fDate
    11/1/1979 12:00:00 AM
  • Firstpage
    1830
  • Lastpage
    1830
  • Keywords
    Annealing; Contracts; Laboratories; Oxidation; Plasma materials processing; Plasma measurements; Plasma temperature; Semiconductor films; Silicon compounds; Substrates;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1979.19706
  • Filename
    1480284
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1065998