DocumentCode
1067371
Title
Levitation of a micromachined rotor for application in a rotating gyroscope
Author
Shearwood, C. ; Williams, C.B. ; Mellor, Phil H. ; Gibbs, M.R.J.
Author_Institution
Dept. of Electron. & Electr. Eng., Sheffield Univ.
Volume
31
Issue
21
fYear
1995
fDate
10/12/1995 12:00:00 AM
Firstpage
1845
Lastpage
1846
Abstract
The design of a micromachined rotating gyroscope is described, incorporating an electromagnetically levitated aluminium rotor. The coil design for levitation produces good lateral stability. A 400 μm diameter, 12 μm thick rotor is levitated to a height of 30 μm
Keywords
coils; gyroscopes; magnetic levitation; micromachining; microsensors; rotors; 30 micron; 400 micron; coil design; electromagnetically levitated rotor; lateral stability; micromachined rotor; rotating gyroscope;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
Filename
475041
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