Design and fabrication of large-area thin-film transistor matrix circuits for flat-display panels

This paper reports the design principles and fabrication process for large-area thin-film transistor matrix circuits for flat-panel displays developed in our laboratory. It is demonstrated that thin-film transistors can be made reproducibly with desirable characteristics. Opens in bus bars and shorts through insulators are the major causes of defects in the matrix circuit and can be reduced by careful process control. Many near-perfect matrix circuits have been fabricated.