DocumentCode
1071320
Title
WA-A6 amorphous silicon integrated circuit
Author
Matsumura, Mieko ; Hayama, Hirofumi
Volume
27
Issue
11
fYear
1980
fDate
11/1/1980 12:00:00 AM
Firstpage
2194
Lastpage
2195
Keywords
Amorphous silicon; Etching; FET integrated circuits; Glass; Integrated circuit interconnections; Inverters; MOSFET circuits; Parasitic capacitance; Predictive models; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1980.20225
Filename
1481018
Link To Document