DocumentCode
1071690
Title
Correction of differential capacitance profiles for Debye-length effects
Author
Wilson, Charles L.
Author_Institution
National Bureau of Standards, Washington, DC
Volume
27
Issue
12
fYear
1980
fDate
12/1/1980 12:00:00 AM
Firstpage
2262
Lastpage
2267
Abstract
Conventional differential capacitance-voltage ( 
) profiling methods are limited in resolution by the method used to convert data to profile data. A new method of numerical calculation of data, using cubic finite elements, is presented which allows a more exact relationship between data and profile data to be calculated. This new method of data reduction allows the resolution of differential profiling method to be extended to dimensions near the local extrinsic Debye length.
) profiling methods are limited in resolution by the method used to convert data to profile data. A new method of numerical calculation of data, using cubic finite elements, is presented which allows a more exact relationship between data and profile data to be calculated. This new method of data reduction allows the resolution of differential profiling method to be extended to dimensions near the local extrinsic Debye length.Keywords
Capacitance; Capacitance-voltage characteristics; Charge carrier density; Data analysis; Electrostatic measurements; Finite element methods; Impurities; Length measurement; Semiconductor diodes; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1980.20262
Filename
1481054
Link To Document