DocumentCode
1072517
Title
Double heterostructure Ga0.47 In0.53 As MESFETs by MBE
Author
Ohno, Hideo ; Barnard, Joseph ; Wood, Colin E.C. ; Eastman, Lester F.
Author_Institution
Cornell University, Ithaca, New York
Volume
1
Issue
8
fYear
1980
fDate
8/1/1980 12:00:00 AM
Firstpage
154
Lastpage
155
Abstract
Ga0.47 In0.53 As MESFETs have been fabricated on InP substrates. The low barrier height of Ga0.47 In0.53 As (0.20 eV) which makes simple GaInAs MESFETs at this composition impractical, has been overcome by using thin Al0.48 In0.52 As layers between gate metal and GaInAs active layers. Al0.48 In0.52 As has also been exploited in the form of buffer layers. The double heterostructure FET wafers with single crystal Al gate metal were grown by molecular beam epitaxy (MBE). The 2.75 µm gate length MESFETs showed d.c. transconductance gm = 57 mS mm-1in spite of nonoptimized dimensions.
Keywords
Buffer layers; Electrons; Fabrication; Gallium arsenide; Indium phosphide; Lattices; MESFETs; Molecular beam epitaxial growth; Schottky barriers; Substrates;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1980.25270
Filename
1481132
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